Bulk-Metal-Based Mems Fabricated by Micro-Electro-Discharge Machining

TitleBulk-Metal-Based Mems Fabricated by Micro-Electro-Discharge Machining
Publication TypeConference Paper
Year of Publication2007
AuthorsTakahata, K., and Y. B. Gianchandani
Conference NameElectrical and Computer Engineering, 2007. CCECE 2007. Canadian Conference on
Pagination1 -4
Date Publishedapr.
Keywordsactuator, actuators, Biomedical Engineering, electrical discharge machining, flow sensors, foils, lithography, mechanically/chemically robust capacitive pressure sensor, MEMS, metal foils, metals, microelectro-discharge machining, microelectro-mechanical systems, micromachining, micromechanical devices, pressure sensors

This paper presents the recent development of micro-electro-mechanical systems (MEMS) and devices realized by planar micromachining of metal foils. New types of cardiac stents including sensor-integrated antenna stents, a micromachined Kelvin probe with an integrated actuator, an intraluminal flow sensor cuff, and a mechanically/chemically robust capacitive pressure sensor are reported. Micro-electro-discharge machining (muEDM) and the modified processes were used for the fabrication of the devices with mechanical or electromechanical functionality. The cost-effective manufacturing is potentially available with the use of the batch mode muEDM technology that employs lithographically fabricated microelectrode arrays.


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