Title | Three-dimensional microfabrication by localized electrochemical deposition |
Publication Type | Journal Article |
Year of Publication | 1996 |
Authors | Madden, J. D., and I. W. Hunter |
Journal | Microelectromechanical Systems, Journal of |
Volume | 5 |
Pagination | 24 -32 |
Date Published | mar. |
ISSN | 1057-7157 |
Keywords | electrochemistry, electroplating, localized electrochemical deposition, mass transport, microfabrication, micromechanical devices, multicoiled helical spring, Ni, nickel, plating, three-dimensional metal structures |
Abstract | A microfabrication technology capable of electrodepositing truly three-dimensional metal structures is introduced. Micrometer-scale nickel structures including a multicoiled helical spring have been fabricated. Electrodeposition is localized by placing a sharp-tipped electrode in a plating solution, near a substrate, and applying a voltage. Structures are built by moving the electrode appropriately with respect to the substrate. Vertical deposition rates of 6 mu;m/s are observed, two orders of magnitude greater than those of conventional electrodeposition. The theory of mass transport to a region of localized field is discussed, and a model of deposition profile is presented. The process can potentially produce submicrometer feature sizes using a range of materials including pure metals, alloys, and polymers |
URL | http://dx.doi.org/10.1109/84.485212 |
DOI | 10.1109/84.485212 |