Sensors and Actuators in Microsystems

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3 Credits

ELEC 462

The mechanisms, design, fabrication, and testing of microsensors, actuators, and microelectromechanical systems (MEMS).

Course Objectives

On the successful completion of this course, the student will be able to:

  • understand basic microfabrication technology
  • design a fabrication process to achieve desired mechanical and electrical structures
  • understand principles of microsensors and microactuators 
  • derive sensor and actuator characteristics
  • design microsensors and microactuators for specific tasks

Course Topics

  • MEMS
  • Microfabrication
  • Piezoresistive sensors
  • Thermal principles and actuation
  • Electrostatics
  • Microfluidics

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