Fine surface finishing method for 3-dimensional micro structures

TitleFine surface finishing method for 3-dimensional micro structures
Publication TypeJournal Article
Year of Publication1997
AuthorsTakahata, K., S. Aoki, and T. Sato
JournalIEICE Transactions on Electronics
VolumeE80C
Pagination291-296
Date PublishedFEB
Type of ArticleArticle
ISSN0916-8524
Keywords3-D micro structure, abrasive grains, ECM, electrophoresis, micro surface finishing, micro-EDM
Abstract

A new finishing method using an advanced ECM assisted by fine abrasive grains was developed, in order to smooth and finish surfaces of 3-dimensional micro components used in micromachines. With the method, a fine surface of selected microarea, which is not obtained by micro-EDM nor conventional ECM, was obtained in a few minutes. We also developed an advanced machine which has a performance of making 3-D complicated micro structures with fine surfaces by the combination of micro-EDM and the developed finishing method. Thr performance is achieved by a sequential process from the micro-EDM to the finishing without handling workpiece. Using the new machine, we obtained a high precision shaft with a mirror-like surface. The result is satisfactory to apply the method to making a cylindrical substrate for a rotor of a micro wobble motor. The machining process combined the micro-EDM and the new finishing will be applied to producing micro components such as mechanical parts, mirrors and molding dies.

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