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| Title | Fine surface finishing method for 3-dimensional micro structures |
| Publication Type | Conference Paper |
| Year of Publication | 1996 |
| Authors | Takahata, K., S. Aoki, and T. Sato |
| Conference Name | Micro Electro Mechanical Systems, 1996, MEMS '96, Proceedings. 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems'. IEEE, The 9th Annual International Workshop on |
| Pagination | 73 -78 |
| Date Published | feb. |
| Keywords | 3-D microstructures, 3-dimensional micro structures, Al2O3, cylindrical substrate, ECM, electrochemical machining, electrolytic machining, fine abrasive grains, fine surface finishing, fine surfaces, MEMS, micro mechanical components, micro wobble motor, micro-EDM, micromachining, micromechanical devices, micromotors, mirror-like surface, rotor, selected micro-area, sequential process, shape accuracy, stainless steel, surface treatment, workpiece handling |
| Abstract | We developed a new finishing method using an advanced ECM (electrochemical machining) assisted by fine abrasive grains in order to finish surfaces of 3-dimensional micro components used in MEMS. With the method, a fine surface of selected micro-area, which is not obtained by micro-EDM (electrodischarge machining) nor conventional ECM, is created in a few minutes. We also developed an advanced machine which has a performance to make 3-D complicated micro structures with fine surfaces by the combination of the micro-EDM and the developed finishing method. The performance is achieved by a sequential process without workpiece handling from the micro-EDM to the finishing. Using the new machine, we obtained a high precision shaft with a mirror-like surface. The result is satisfactory to apply the method to make a cylindrical substrate for a rotor of micro wobble motor. We are sure that the process will be applied to producing practical micro mechanical components |
| URL | http://dx.doi.org/10.1109/MEMSYS.1996.493832 |
| DOI | 10.1109/MEMSYS.1996.493832 |