Noise-based optimization and noise analysis for resonant MEMS structures

TitleNoise-based optimization and noise analysis for resonant MEMS structures
Publication TypeConference Paper
Year of Publication2008
AuthorsSharma, M., A. Kannan, and E. Cretu
Conference NameDesign, Test, Integration and Packaging of MEMS/MOEMS, 2008. MEMS/MOEMS 2008. Symposium on
Pagination85 -90
Date Publishedapr.
KeywordsFEA simulations, finite element analysis, micromechanical resonators, noise analysis, noise measurement, noise-based optimization, optimisation, resonant MEMS structures, squeeze-film damping

This paper presents a detailed noise analysis and noise-based optimization procedure for resonant MEMS structures. A design for high sensitivity of MEMS structures needs to take into account the noise shaping induced by damping phenomena at micro scale. The extraction of a behavioral model of the solid gas interaction is obtained by matching the FEA simulations with a parametric expression for the squeeze-film damping, suggested by the analytical modeling.


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