Raman spectroscopy of B-doped microcrystalline silicon films

TitleRaman spectroscopy of B-doped microcrystalline silicon films
Publication TypeJournal Article
Year of Publication2003
AuthorsSaleh, R., and N. H. Nickel
JournalThin Solid Films
Date PublishedMAR 3
Type of ArticleProceedings Paper
Keywordsboron, microcrystalline silicon, Raman scattering

The boron-doped microcrystalline silicon (muc-Si:H) films have been deposited in a plasma-enhanced chemical vapor deposition system using hydrogen (H-2) as a diluent gas of silane (SiH4) and diborane (B2H6) as the dopant gas at several gas phase doping ratios. The structural properties of the films have been investigated by Raman measurements. The Raman spectroscopy revealed that the increase of diborane gas phase doping ratio to silane reduces the crystalline volume fraction (X-C) and changes the nature of the hydrogen bonded silicon in the films. (C) 2002 Elsevier Science B.V. All rights reserved.


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