Optimal scheduling techniques for cluster tools with process-module and transport-module residency constraints

TitleOptimal scheduling techniques for cluster tools with process-module and transport-module residency constraints
Publication TypeJournal Article
Year of Publication2002
AuthorsRostami, S., and B. Hamidzadeh
JournalSemiconductor Manufacturing, IEEE Transactions on
Volume15
Pagination341 - 349
Date Publishedaug.
ISSN0894-6507
Keywordsalgorithm, cluster tools, constraint theory, dual-arm cluster tool, linear programming, optimal scheduling technique, process-module residency constraint, scheduling, semiconductor manufacturing, throughput, transport-module residency constraint
Abstract

This paper discusses two scheduling techniques for dual-arm cluster tools that address both process-module and transport-module residency constraints and throughput requirements. The first technique is the extension of our previous work that only addressed process-module residency constraints. For cases with long process times, this technique can take a long time to find the solution and is not practical. Hence, we use this algorithm mainly as a benchmark for comparison. The second technique that uses a linear programming technique with use of several heuristics can find the optimal solution very efficiently. Analytical and experimental analysis of this technique shows the correctness, completeness and efficiency of this technique.

URLhttp://dx.doi.org/10.1109/TSM.2002.801379
DOI10.1109/TSM.2002.801379

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