Pull-in dynamics: analysis and modeling of the transitional regime

TitlePull-in dynamics: analysis and modeling of the transitional regime
Publication TypeConference Paper
Year of Publication2004
AuthorsRocha, L. A., E. Cretu, and R. F. Wolffenbuttel
Conference NameMicro Electro Mechanical Systems, 2004. 17th IEEE International Conference on. (MEMS)
Pagination249 - 252
Keywordsaccelerometer, accelerometers, analytical model, damped system, electrostatic actuators, MEMS switches, metastable deflection, microelectromechanical system, microswitches, parallel plate electrostatic actuator, pull in displacement, pull in dynamic transition, pull in time operated accelerometer, reliability, sensors

A meta-stable deflection just beyond pull-in displacement of a parallel-plate electrostatic actuator has been identified and it is demonstrated that this effect ultimately governs the pull-in time in critically damped systems. The modeling of this meta-stable regime, therefore, largely determines the reliability of the overall calculation of the pull-in dynamic transition. An analytical model is derived and compared with measurements. The model accuracy, despite its simplicity, is sufficient to make it a valuable tool for the design of MEMS switches outside vacuum and for sensors based on measuring pull-in time. A first test on a pull-in time-operated accelerometer provides a sensitivity of 0.92 mu;s/ mu;g and a noise level at 72 mu;g/ radic;Hz.


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