Analysis and analytical modeling of static pull-In with application to MEMS-based voltage reference and process monitoring

TitleAnalysis and analytical modeling of static pull-In with application to MEMS-based voltage reference and process monitoring
Publication TypeJournal Article
Year of Publication2004
AuthorsRocha, L. A., E. Cretu, and R. F. Wolffenbuttel
JournalMicroelectromechanical Systems, Journal of
Volume13
Pagination342 - 354
Date Publishedapr.
ISSN1057-7157
Keywords100 hours, 2-DOF asymmetrically operated device, 5 to 10 V, analytical modeling, analytically simulation, asymmetrically driven structures, drive mode dependence, epi-poly process, folded-spring-suspended 1-DOF structures, hysteresis, MEMS-based voltage reference, micromechanical devices, modelling, numerical analysis, numerically analysis, one-degrees-of-freedom structures, process dependencies, process monitoring, reference circuits, single-side-clamped 2-DOF beams, static pull-In voltage, symbolical analysis, symmetrically operated devices, temperature stability, time stability, two-degrees-of-freedom structures
Abstract

The pull-in voltage of one- and two-degrees-of-freedom (DOF) structures has been symbolically and numerically analyzed with respect to drive mode dependence and hysteresis. Moreover, the time and temperature stability has been investigated and tested. Modeling results have been applied in the design of both folded-spring-suspended 1-DOF structures and single-side-clamped 2-DOF beams with a nominal pull-in voltage in the 5-10 V range and fabricated in an epi-poly process. Asymmetrically driven structures reveal pull-in close to the value predicted by the model (Vpi 1-DOF is 4.65 V analytically simulated and 4.56 V measured; Vpi 2-DOF is 9.24 V analytically simulated, 9.30 V in FEM and 9.34 V measured). Also the hysteresis is in close agreement (release voltage, Vr, 1-DOF is 1.41 V analytically simulated and 1.45 V measured; Vr 2-DOF is 9.17 V analytically simulated, 9.15 V in FEM and 9.27 V measured). In symmetrically operated devices the differences between the computed and measured Vpi and Vr are much larger and are due to process dependencies, which make these devices very suitable for process monitoring. The 2-DOF asymmetrically operated device is the most suitable for MEMS-based voltage reference. The stability in time is limited by charge build-up and calls for a 100-hour initial burn-in. Temperature dependence is -100 mu;V/K at Vpi asymp;5 V, however, is calculable and thus can be corrected or compensated.

URLhttp://dx.doi.org/10.1109/JMEMS.2004.824892
DOI10.1109/JMEMS.2004.824892

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