Mechanical spectrum analyzer in silicon using micromachined accelerometers with time-varying electrostatic feedback

TitleMechanical spectrum analyzer in silicon using micromachined accelerometers with time-varying electrostatic feedback
Publication TypeConference Paper
Year of Publication2003
AuthorsRocha, L. A., E. Cretu, G. de Graaf, and R. F. Wolffenbuttel
Conference NameInstrumentation and Measurement Technology Conference, 2003. IMTC '03. Proceedings of the 20th IEEE
Pagination1197 - 1201 vol.2
Date Publishedmay.
Keywords-based acceleration measurement, accelerometers, capacitive accelerometer, condition monitoring, drive voltage, electronic modulation, electrostatic force feedback, electrostatic time-varying actuation, force feedback, inverted pendulum, mechanical domain, mechanical frequency component, mechanical machine, mechanical spectrum analyzer, micromachined accelerometer, micromachining, momentum feedback, pendulums, silicon, spectral analysers, spring constant, time-varying electrostatic feedback, vibration measurement

Capacitive accelerometers with electrostatic force feedback are widely employed, because of performance and robustness. The force feedback acts as a means for electronic modulation of the spring constant of the suspension. Commonly, the electrostatic feedback is employed for -based acceleration measurement. A suitable electrostatic time-varying actuation could instead be used to make the accelerometer selectively sensitive to a coherent mechanical frequency component. By sweeping the frequency of the drive voltage over a selected range, the mechanical spectrum is analyzed in the mechanical domain. The resulting spectrum analyzer features many advantages compared to conventional techniques for condition monitoring of mechanical machines. An inverted pendulum type of accelerometer structure has been fabricated in silicon using micromachining techniques and operated using electrostatic momentum feedback.


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