AMORPHOUS-SILICON THIN-FILM TRANSISTORS MODIFIED BY DOPING AND PLASMA TREATMENT OF THE NITRIDE

TitleAMORPHOUS-SILICON THIN-FILM TRANSISTORS MODIFIED BY DOPING AND PLASMA TREATMENT OF THE NITRIDE
Publication TypeConference Paper
Year of Publication1991
AuthorsNICKEL, N., R. Saleh, W. FUHS, and H. MELL
EditorMADAN, A., Y. HAMAKAWA, M. J. THOMPSON, P. C. TAYLOR, and P. G. LECOMBER
Conference NameAMORPHOUS SILICON TECHNOLOGY - 1991
Pagination309-314
PublisherMAT RES SOC
ISBN Number1-55899-113-1

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