Title | Reduction of dark current under reverse bias in a-Si : H p-i-n photodetectors |
Publication Type | Conference Paper |
Year of Publication | 2002 |
Authors | Morrison, S., P. Servati, Y. Vygranenko, A. Nathan, and A. MADAN |
Editor | Cohen, J. D., J. R. Abelson, H. Matsumura, and J. Robertson |
Conference Name | AMORPHOUS AND HETEROGENEOUS SILICON-BASED FILMS-2002 |
Pagination | 701-706 |
Publisher | Mat Res Soc |
Conference Location | 506 KEYSTONE DRIVE, WARRENDALE, PA 15088-7563 USA |
ISBN Number | 1-55899-651-6 |
Abstract | This paper presents the development of low dark current amorphous silicon (a-Si:H) based heterojunction photodiodes. A series of p-i-n and n-i-p structures have been deposited by plasma-enhanced chemical vapor deposition (PECVD). Junction properties and carrier transport are investigated in terms of dark and light current-voltage characteristics, time dependence of the dark current, and spectral photoresponse measurements. It is demonstrated that a thin (similar to4 nm) undoped a-SiC:H buffer layer introduced between the p and i layers reduces the leakage current and improves the diode ideality factor. A dark current density of similar to10 pA/cm(2) at reverse bias of I V was achieved for the n-i-p structure. Optimization of device design for further improvement of dark current and photoresponse is discussed. |