Full-Gap Positioning of Parallel-Plate Electrostatic MEMS Using On-off Control

TitleFull-Gap Positioning of Parallel-Plate Electrostatic MEMS Using On-off Control
Publication TypeConference Paper
Year of Publication2007
AuthorsMol, L., R. F. Wolffenbuttel, E. Cretu, and L. A. Rocha
Conference NameIndustrial Electronics, 2007. ISIE 2007. IEEE International Symposium on
Pagination1464 -1468
Date Publishedjun.
Keywordsclosed-loop feedback, electrostatic actuator, electrostatic actuators, electrostatic parallel-plate actuator, full-gap positioning, on-off control, optimized structure, parallel-plate electrostatic MEMS
Abstract

Electrostatic parallel-plate actuators are classically limited to displacements up to 1/3 of the gap due to the pull-in effect [1],[2|. A closed-loop feedback based method presented in [3] is recently introduced to overcome this limitation. Optimized structures are designed to minimize residual position ripple while maintaining bandwidth, effectively reducing the required device size of positioning electrostatic actuators by a factor three.

URLhttp://dx.doi.org/10.1109/ISIE.2007.4374817
DOI10.1109/ISIE.2007.4374817

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