Pre-distorted sinewave-driven parallel-plate electrostatic actuator for harmonic displacement

TitlePre-distorted sinewave-driven parallel-plate electrostatic actuator for harmonic displacement
Publication TypeJournal Article
Year of Publication2005
Authorsde Graaf, G., L. Mol, L. A. Rocha, E. Cretu, and R. F. Wolffenbuttel
JournalJournal of Micromechanics and Microengineering
Volume15
PaginationS103
Abstract

Harmonic displacement of a parallel-plate electrostatic actuator up to 50% of the static pull-in displacement has been achieved despite the non-linear voltage-to-displacement function using a driving voltage with a pre-distorted waveform. The microstructure is fabricated in an epi-poly process and the circuit is implemented in a CMOS process and designed for operation of the MEMS in a frequency range up to 1 kHz. The pre-distorted waveform is synthesized using 16 samples per period with 16 non-uniformly spaced quantization levels, using a ladder with accurately scaled resistors. Harmonic actuation has been demonstrated with 34 dB reduction of second-order distortion compared to systems with sinusoidal actuation. The residual second harmonic content in the harmonic displacement is typically −42 dB.

URLhttp://stacks.iop.org/0960-1317/15/i=7/a=015

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