Microelectronics, MEMS and nanotechnology - Foreword

TitleMicroelectronics, MEMS and nanotechnology - Foreword
Publication TypeJournal Article
Year of Publication2006
AuthorsFaraone, L., V. K. Varadan, and D. L. Pulfrey
JournalSmart Materials & Structures
Volume15
ISSN0964-1726

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