A micromachined Kelvin probe for surface potential measurements in microfluidic channels and solid-state applications

TitleA micromachined Kelvin probe for surface potential measurements in microfluidic channels and solid-state applications
Publication TypeConference Paper
Year of Publication2003
AuthorsChu, L. L., K. Takahata, P. Selvaganapathy, J. L. Shohet, and Y. B. Gianchandani
Conference NameTransducers, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003
Pagination384 - 387 vol.1
Date Publishedjun.
Keywordscontact potential, discharges (electric), electric actuators, electrical isolation, liquid, micro electro-discharge, microelectronics, microfluidics, micromachined Kelvin probe, micromachined structure, parylene microfluidic channel, pH, scanning tip, Si, silicon compounds, SiO2, solid-state applications, surface potential
Abstract

This paper reports on a micromachined Kelvin probe structure with integrated scanning tip and dither actuation mechanism. It is fabricated by a modified micro electro-discharge machining process which allows electrical isolation within the micromachined structure using epoxy plugs. The device is used to measure changes in the external surface potential of a parylene microfluidic channel as a function of varying pH of liquid inside the channel. A contact potential difference of asymp;6 V is measured for a change in pH from 4 to 8 within the channel. The device is also used to map embedded charge in a thin SiO2 layer on a Si substrate, showing it to be suitable for monitoring microelectronics manufacturing processes.

URLhttp://dx.doi.org/10.1109/SENSOR.2003.1215334
DOI10.1109/SENSOR.2003.1215334

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