Localisation of devices acting as heat sources in ICs covered entirely by metal layers

TitleLocalisation of devices acting as heat sources in ICs covered entirely by metal layers
Publication TypeJournal Article
Year of Publication2003
AuthorsAltet, J., M. A. Salhi, S. Dilhaire, A. Syal, and A. Ivanov
JournalElectronics Letters
Volume39
Pagination1440–1442
ISSN0013-5194
Abstract

The feasibility is shown of using the dynamic monitoring of the displacement of the uppermost metal layer due to thermal dilatations to locate devices that generate hot spots in a CMOS IC layout with five levels of metals and with metal fills.
URLhttp://dx.doi.org/10.1049/el:20030907
DOI10.1049/el:20030907

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