Micro/Nanofabrication and Instrumentation Laboratory

More Information

UBC Calendar

Course Page

3 Credits

ELEC 463

Microfabrication methods and nanofabrication techniques. Imaging and characterization of micro and nanostructures. Restricted to students admitted to the Nanotechnology and Microsystems Option in Electrical Engineering. [2-4-0]

Course Outline
This is a hands-on opportunity to develop skills in design, fabrication and experimentation relating to CMOS manufacturing in the context of silicon photonics applications.  In this course, students will design an optical circuit using commercial EDA tools (Electronic Design Automation) and optical modelling TCAD Software (Technology Computer Aided Design), have it fabricated via electron beam lithography, and conduct post-processing (thin film deposition, optical lithography, metal deposition) and characterization (AFM, SEM, optical, electronic) in the AMPEL Nanofabrication Facility and optoelectronics labs.

Target Audience
students with an interest in CMOS, electronics, and/or optical design; EECE Nano option students.

Course Topics

Introduction to micro/nano devices, fabrication and characterization

  • Lithography
  • Thin film deposition
  • Etching
  • CMOS manufacturing
  • Silicon photonics
  • Electron microscopy
  • Scanning probe microscopy

No formal pre-requisites; basic math, programming and computer skills assumed




a place of mind, The University of British Columbia

Electrical and Computer Engineering
2332 Main Mall
Vancouver, BC Canada V6T 1Z4
Tel +1.604.822.2872
Fax +1.604.822.5949

Emergency Procedures | Accessibility | Contact UBC | © Copyright 2018 The University of British Columbia